| 摘要 |
PROBLEM TO BE SOLVED: To form an image onto the pupil of an objective lens with an aperture diaphragm fixed, without changing imaging magnification. SOLUTION: An illuminator 100 includes a relay optical system 25 that forms an image of the aperture diaphragm 24 onto the pupil 5a of the objective lens 5 movable in the direction of an observation optical axis OA1 and emitting illuminating light, passed through the aperture diaphragm 24, to a specimen 1 via the objective lens 5. The relay optical system 25 includes: a collimating lens 27 that collimates the illuminating light emitted from the aperture 24a of the aperture diaphragm 24; and a convergence lens 28 that is disposed so as to be freely movable in the direction of an illuminating optical axis OA2 being a common axis with the optical axis of itself, and that converges the illuminating light, collimated by the collimating lens 27, onto the pupil 5a of the objective lens 5. COPYRIGHT: (C)2008,JPO&INPIT
|
