| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for preventing breakage of an inertia sensor due to excessive impact. SOLUTION: The inertia sensor is provided with a first locking piece extended over a plumb bob part across a slit from a side wall of an outside frame and formed of a silicone thin film layer, a first recess part having a bottom face facing the back face of the first locking piece via a clearance and formed above the plumb bob part, a second locking piece extended over the side wall of the outside frame across the slit from the plumb bob part and formed of a silicone thin film layer, a second recess part having a bottom face facing the back face of the second locking piece via a clearance and formed above the side wall of the outside frame, and a projection piece protruded above the slit from the side wall of the outside frame to the plumb bob part and formed of a silicone thin film layer. A stopper mechanism is formed when the first locking piece and the projection piece are arranged adjacently to each other on the both sides of the second recess part and the second locking piece is arranged while leaving a clearance to the side face of the second recess part, and the stopper mechanism is arranged in each of the both sides of a flexible part. COPYRIGHT: (C)2008,JPO&INPIT
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