| 摘要 |
PROBLEM TO BE SOLVED: To properly and easily evaluate the tightness between an object to be film-formed and a film formed thereon. SOLUTION: The film 11 is formed on the object 10 to be film-formed, and an additional film 12 is formed on the film 11 to change the tightness between the object 10 to be film-formed and the film 11. An adhesive tape or the like is bonded on the additional film 12 after the additional film 12 is formed to change the tightness between the object 10 to be film-formed and the film 11, and it is pulled to investigate the presence of separation between the object 10 to be film-formed and the film 11. The tightness between the object 10 to be film-formed and the film 11 is evaluated based on a result thereof. The film 11 becomes easy to be separated, or a difference in the tightness between different samples becomes easy to be observed, by forming the additional film 12 on the film 11, and the tightness is properly and easily evaluated by this manner. COPYRIGHT: (C)2008,JPO&INPIT
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