NANO ELECTROMECHANICAL INTEGRATED-CIRCUIT BANK AND SWITCH

摘要

A bank of nano electromechanical integrated circuit filters (100). The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators (104, 112), wherein the at least two resonators include sub-micron excitable elements (106, 110) and wherein the at least two resonators possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements.