发明名称 PIEZOELECTRIC VIBRATING PIECE AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating piece which can be made smaller-sized without increasing a CI value in comparison with a tuning fork type vibrating piece and allows a good CI value to be obtained by an easier manufacturing process in comparison with that of a torsional mode vibrating piece. <P>SOLUTION: A vibrating arm 12 has one front end of a U shape extended to be connected to a base part 10 and is bent away from the other vibrating arm 12 and is extended furthermore. An excitation electrode 42 includes side face electrodes 44 formed on both of left and right side faces 18 and 20 of first and second arm parts 22 and 26 and center electrodes 56 formed in areas other than both of left and right side faces 18 and 20 of first and second arm parts 22 and 26. By electric fields generated between the left and right side face electrodes 44 and the center electrodes 56 by application of a voltage, the second arm parts 26 are bent away from each other when the first arm parts 22 of the pair of vibrating arms 12 are bent away from each other, and the second arm parts 26 are bent toward each other when the first arm parts 22 of the pair of vibrating arms 12 are bent toward each other. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008199283(A) 申请公布日期 2008.08.28
申请号 JP20070032126 申请日期 2007.02.13
申请人 EPSON TOYOCOM CORP 发明人 HIRASAWA NORIYA
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H01L41/253;H01L41/29;H01L41/332;H03H3/02;H03H3/04;H03H9/215 主分类号 H03H9/19
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