| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charge detecting type sensor of high precision, without exposing a detection terminal and a terminal for connecting a charge amplifier, to an outer circumferential part of a package container, and also to provide the package container used therefor. <P>SOLUTION: The second detection terminal 16A of a gyro vibration piece 1 stored in a cavity of the package container 150 is connected to the second detection signal input pad 106A connected to the charge amplifier of an IC 100, via an IC connection terminal 126A provided on the second layer substrate 120 by a bonding wire 99. The IC connection terminal 126A is formed with a metal plated layer by impressing a voltage from the outer circumferential part of the package container 150 by a plating wire 123c led out from one end portion of the IC connection terminal 126A. The plating wire 123c is cut in a position viewed in top view in the state where the metal plated layer is formed in the IC connection terminal 126A. <P>COPYRIGHT: (C)2008,JPO&INPIT |
