| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately form a resist pattern having a predetermined film thickness. SOLUTION: The liquid discharge method comprises discharging a resist ink containing resist particles dispersed in a solvent from a plurality of nozzles toward a substrate, wherein an average particle size per volume of the particles is set larger than the film thickness of the solvent of the resist ink which has been splashed on the substrate and has become a balanced state. By providing the method, the problem can be solved. COPYRIGHT: (C)2008,JPO&INPIT
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