| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray imaging apparatus which can obtain a high definition X-ray image by preventing the occurrence of strain on the boundary of layers of different materials. SOLUTION: The X-ray imaging apparatus comprises a phosphor film 102, a photoelectric conversion part 103 provided on the phosphor film 102, an insulating film 301 provided on the surface of the photoelectric conversion part 103 opposing the surface on which the phosphor film 102 is provided, a plurality of switching elements 402 provided through the insulating film 301 in correspondence with a plurality of pixels arranged in array on the photoelectric conversion part 103, and a pixel electrode 502 for connecting the switching element 402 and the photoelectric conversion part 103 electrically through a contact hole 304 provided in the insulating film 301. COPYRIGHT: (C)2008,JPO&INPIT
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