| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump device preventing a water hammer phenomenon occurring in an ejector in stop of a circulating pump. SOLUTION: The ejector 1, a tank 2, and the circulating pump 3 are connected in series. An actuator 14 is connected with an atmosphere suction valve 9, and the atmosphere suction valve 9 is provided with an atmosphere passing port 13 communicating with the inside of the ejector 1, and an atmosphere suction port 15 communicating with an upper part in the tank 2. When driving of the circulating pump 3 is stopped, the water hammer phenomenon inside the ejector 1 is prevented by sucking the atmosphere from the atmosphere suction valve 9 to the vacuum-state ejector 1. COPYRIGHT: (C)2008,JPO&INPIT
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