Piezoelektrisches Dünnschichtlaminat und Herstellungsverfahren dafür, akustisches Oberflächenwellenelement, Frequenzfilter, Oszillator, elektronischer Schaltkreis und elektronisches Instrument

摘要

A piezoelectric film laminate (100) comprising a sapphire substrate (11), a lead zirconate titanate film (12) and a postassium niobate film (13) stacked on the lead zirconate titanate film is provided, including a method of production for the piezoelectric film laminate. Furthermore, a surface acoustic wave device based on this film laminate is provided, as are applications thereof such as frequency filter or an oscillator.