| 摘要 |
PROBLEM TO BE SOLVED: To detect only a real current by ions generated from an emitter of a corona discharge type ionizer; to detect a discharging current contributing actually to discharge of an object to be discharged in the real current; and to thereby confirm the degree of fouling or deterioration of the emitter, a discharging performance thereof or the like. SOLUTION: This corona discharge type ionizer wherein a grounded electrode is arranged near the emitter to which a high voltage is applied measures simultaneously the total current flowing in the grounded electrode and the first induced current by the high voltage applied to the emitter, and the second induced current flowing in the grounded electrode by an electric field formed by the emitter, which is a component of the total current, is estimated from the first induced current, and the real current generated by ions generated from the emitter is measured from a difference between the total current and the second induced current. COPYRIGHT: (C)2008,JPO&INPIT
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