| 摘要 |
PROBLEM TO BE SOLVED: To provide masks for vapor deposition where thin films with different film thicknesses can be deposited per region to be film-deposed by one time of vapor deposition process, to provide a mask vapor deposition method, and to provide a method for producing an organic electroluminescence apparatus. SOLUTION: Masks 31 for vapor deposition are superimposed on an element substrate 2, and, in the element substrate 2, thin films are deposited on regions corresponding to the mask opening parts 32 formed at the masks 31 for vapor deposition. At this time, since the ratio of the area of the inlet side opening 321 to the area of the outlet side opening 322 is differentiated in the mask opening parts 32(R), 32(G) and 32(B), by only performing single vapor deposition stage, a thick-filmed electron injection transporting layer 7 can be formed at the region corresponding to the mask opening part 32(R) having a high ratio, and a thin-filmed electron injection transporting layer 7 can be formed at the region corresponding to the mask opening part 32(B) having a low ratio. COPYRIGHT: (C)2008,JPO&INPIT
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