NANOCHANNEL APPARATUS AND METHOD OF FABRICATING

摘要

A nanochannel apparatus 10, 20, 30, 40, 50, 60 and method 200, 400 of fabrication provide an array of nanochannels 16, 206, 36, 406 with distal open or exposed ends 51, 53, 61, 63 formed in situ through a permanent support 12, 205, 32, 405. A nanofluidic system 500, 600 includes the nanochannel apparatus, a fluidic interface 501, 503, 601, 603, and a component 510, 512, 610, 604, 606 interfaced to the nanochannel apparatus. The method 200, 400 includes encasing 230, 430 an array of nanowires 203, 403 in a support 204, 205, 404, 405, and forming the array of nanochannels in situ in locations of the nanowires, such that distal ends of the nanochannels are exposed.