发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND CURED BODY
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition ensuring adequate developability and forming an image with good resolution in a thick film while using a polyimide resin precursor. <P>SOLUTION: The photosensitive resin composition comprises (A) an alkali-soluble polyamic acid having a structure represented by general formula (1), (B) a photopolymerizable compound having an ethylenically unsaturated group in a molecule, (C) a photopolymerization initiator comprising a hexaarylbiimidazole compound, and (D) a sensitizing dye having an absorption maximum wavelength in a wavelength range of 370-410 nm. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008197158(A) 申请公布日期 2008.08.28
申请号 JP20070029425 申请日期 2007.02.08
申请人 HITACHI CHEM CO LTD 发明人 TANIMOTO AKITOSHI;KATO SADAAKI;MINEGISHI TOMONORI
分类号 G03F7/037;G03F7/004;G03F7/027;G03F7/031;H01L21/027 主分类号 G03F7/037
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