| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the effect of magnetic flux that leaks into surroundings when repulsive force is generated, in a stage device which accelerates/decelerates a stage by utilizing repulsive force of a magnet. <P>SOLUTION: The stage device comprises a force applying means which comprises a first magnet provided at a stage, and a second magnet which is provided at the end of a moving stroke of the stage to face the first magnet to apply a force to the stage by utilizing a repulsive force working between the first magnet and the second magnet, as well as a drive means which drives the stage within the moving stroke. It also comprises a magnetic flux reinforcing means for reinforcing magnetic flux of the second magnet, and a magnetic shield for shielding the magnetic flux from the second magnet. <P>COPYRIGHT: (C)2008,JPO&INPIT |
