| 摘要 |
<P>PROBLEM TO BE SOLVED: To convey a wafer automatically without manual help as much as possible in a case when a wafer is brought into a state where the same can not be retained on a wafer stage during conveyance by a wafer supporting unit and the subsequent conveyance can not be guaranteed. <P>SOLUTION: Measurement of existence of the wafer is effected through an absolute coordinate in the device utilizing the existing sensors 5, 6, 7 to determine the posture (amount, direction and inclination of deviation) of the wafer based on the information. The information is compared with a preset allowable amount to judge the possibility of the conveyance and when it is possible, the conveyance is carried out. <P>COPYRIGHT: (C)2008,JPO&INPIT |
