| 摘要 |
PROBLEM TO BE SOLVED: To shorten a calculation time as for a charge orbital calculation method for calculating a scattering orbit in charge scattering caused by irradiation of a charged beam to an object. SOLUTION: This charge orbital calculation method is to calculate the scattering orbit of charge scattering caused by irradiation of the charged beam to the object by simulation. In this charge orbital calculation method, a simulation region corresponding to the existing region of the object is set, the simulation region is divided into a plurality of segment regions, the scattering orbit of charge scattering caused by irradiation of the charged beam into a prescribed segment region is calculated by Monte Carlo calculation, a potential distribution produced in the simulation region by irradiation of the charged beam to the outside of the prescribed segment region is calculated based on the function value of the approximation function of the potential distribution or a charge distribution, and the scattering orbit of the charge scattering caused by irradiation of the charged beam to the outside of the prescribed segment region is calculated based on the potential distribution calculated by Monte Carlo calculation based on the function value of the approximation function. COPYRIGHT: (C)2008,JPO&INPIT
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