COMPOSITE SENSOR

摘要

A composite sensor includes a flexible body having fixation sections to which weight sections are connected via flexible sections, facing electrodes arranged on the surfaces of the weight sections, and sensing electrodes arranged on the flexible sections, and the composite sensor also includes a substrate having substrate electrodes superposed on the flexible body so as to face it and arranged facing the facing electrodes of the weight sections. Acceleration is detected based on capacitance between each facing electrode and the corresponding substrate electrode, and angular velocity is detected based on a variation in electric charges in each sensing electrode.