发明名称 AMORPHOUS INSULATOR FILM AND THIN-FILM TRANSISTOR
摘要 <p>An amorphous insulator film is provided which is composed of silicon (Si) oxide, in which the amorphous insulator film includes Ar and an amount of Ar included therein is equal to or larger than 3 atom% in terms of atomic ratio with respect to Si.</p>
申请公布号 WO2008102651(A1) 申请公布日期 2008.08.28
申请号 WO2008JP52091 申请日期 2008.02.04
申请人 CANON KABUSHIKI KAISHA;YABUTA, HISATO;KAJI, NOBUYUKI;HAYASHI, RYO 发明人 YABUTA, HISATO;KAJI, NOBUYUKI;HAYASHI, RYO
分类号 H01L21/28;H01L29/49;H01L29/51;H01L29/786 主分类号 H01L21/28
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