发明名称 |
DEFORMABLE MIRROR DEVICE AND APPARATUS FOR OBSERVING RETINA OF EYE |
摘要 |
It is made possible to improve the variations in the "generated force (load)-deflection characteristics". A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.
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申请公布号 |
US2008204661(A1) |
申请公布日期 |
2008.08.28 |
申请号 |
US20070955044 |
申请日期 |
2007.12.12 |
申请人 |
KABUSHIKI KAISHA TOSHIBA;KABUSHIKI KAISHA TOPCON |
发明人 |
KOGA AKIHIRO;SEKIMURA MASAYUKI;MASUNISHI KEI;KOBAYASHI AKIO;KAWASHIMA HIROYUKI;MARUYAMA HIROTAKE |
分类号 |
A61B3/10;G02B7/188 |
主分类号 |
A61B3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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