发明名称 Magnetic recording medium, method for manufacturing the same, and magnetic recording/reproducing apparatus
摘要 There is provided a method for fabricating a magnetic recording medium that provides high throughput, low manufacturing cost, and no degradation in accuracy in pattern size in fine pattern formation. A resist layer is formed on a substrate or cutting work layer. The surface of the substrate is divided into two or more areas using the center of rotation of the substrate as a reference point. An optical, contactless pattern transfer method is used to transfer a figure pattern contained in the divided area through a mask to the resist layer so as to form a latent image of the figure pattern. The pattern transfer is similarly carried out for the divided area. After the pattern transfer processes for all the divided areas are completed, the entire resist layer is developed to form a resist pattern. The resist pattern is used as a mask to cut the substrate or cutting work layer. As a result, there is provided the substrate or cut work layer onto which a fine pattern has been transferred.
申请公布号 US2008204934(A1) 申请公布日期 2008.08.28
申请号 US20070984278 申请日期 2007.11.15
申请人 HITACHI, LTD. 发明人 TSUCHIYA YUKO;HAGINOYA CHISEKI
分类号 G11B5/82;G03C5/00;G11B5/706 主分类号 G11B5/82
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