| 摘要 |
PROBLEM TO BE SOLVED: To provide a teeth material and a substrate storage container capable of simplifying a structure of a die for molding a container body. SOLUTION: A front-open-box-type container body 1 with a size capable of storing two semiconductor wafers, a teeth material 20 built into the container body 1 for supporting an array of the semiconductor wafers, a lid detachably fitted on an opened front face of the container body 1 and an endless gasket interposed between the container body 1 and the lid for exhibiting airtightness are provided. The teeth object 20 is integrally formed of a plurality of pairs of teeth 21 fitted respectively into internal surfaces of both sidewalls of the container body 1 for supporting a periphery of the backside of the semiconductor wafer and a coupling piece 23 for coupling the rear parts of the plurality of pairs of teeth 21 and fitted to an internal bottom surface of the container body 1. Since the teeth material 20 is assembled later with the container body 1, the die for molding the container body 1 does not get hard to open or a core die need not be of the split type. COPYRIGHT: (C)2008,JPO&INPIT |
