| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor relay capable of remarkably reducing leakage current toward downstream side in a semiconductor relay to be used for a semiconductor testing device, for example. SOLUTION: A representative configuration of the semiconductor relay is provided with a switch SW 1 whose upstream side terminal is connected to a power supply side, a switch SW 2 whose upstream side terminal is connected to a downstream side terminal of the switch SW 1, and a voltage follower (operational amplifier OP 1) whose input terminal is connected to a downstream side terminal of the switch SW 2 and whose output terminal is connected to the upstream side terminal of the switch SW 2, and turns on/off the switches SW 1 and SW 2. COPYRIGHT: (C)2008,JPO&INPIT
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