| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid leakage detecting mechanism which prevents a liquid leaked from a discharge unit from dropping onto a material to be coated and then detecting a small amount of the leaked liquid, and to provide a liquid material coating device equipped with the same. SOLUTION: The liquid leakage detecting mechanism attachable to a coating apparatus for applying a liquid material while relatively moving a work placed on a table and a discharge unit facing the work is constituted of a receiving tray having an opening part installed at a position facing to the discharge opening of the discharge unit and a leaked liquid detecting device for detecting the leaked liquid stored in the receiving tray, and is arranged directly under the discharge unit. The liquid material coating device equipped with the mechanism is disclosed. COPYRIGHT: (C)2008,JPO&INPIT
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