发明名称 QUANTUM DOTS NUCLEATION LAYER OF LATTICE MISMATCHED EPITAXY
摘要 Lattice mismatched epitaxy and methods for lattice mismatched epitaxy are provided. The method includes providing a growth substrate and forming a plurality of quantum dots, such as, for example, AlSb quantum dots, on the growth substrate. The method further includes forming a crystallographic nucleation layer by growth and coalescence of the plurality of quantum dots, wherein the nucleation layer is essentially free from vertically propagating defects. The method using quantum dots can be used to overcome the restraints of critical thickness in lattice mismatched epitaxy to allow effective integration of various existing substrate technologies with device technologies.
申请公布号 US2008206966(A1) 申请公布日期 2008.08.28
申请号 US20060326432 申请日期 2006.01.06
申请人 HUFFAKER DIANA L;DAWSON LARRY R;BALAKRISHNAN GANESH 发明人 HUFFAKER DIANA L.;DAWSON LARRY R.;BALAKRISHNAN GANESH
分类号 H01L21/20 主分类号 H01L21/20
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