发明名称 |
ANTIREFLECTIVE COATING COMPOSITION BASED ON A SILICON POLYMER |
摘要 |
The present invention relates to an antireflecting coating composition which is capable of forming a crosslinked coating underneath a layer of photoresist comprising a silicon polymer, where the silicon polymer comprises at least one unit with the structure 1, where, R<SUB>1</SUB> <SUB/>is sele |
申请公布号 |
WO2008102259(A2) |
申请公布日期 |
2008.08.28 |
申请号 |
WO2008IB00517 |
申请日期 |
2008.02.18 |
申请人 |
AY ELECTRONIC MATERIALS USA CORP. |
发明人 |
ABDALLAH, DAVID;ZHANG, RUZHI |
分类号 |
C09D183/06;G03F7/075;H01L21/312 |
主分类号 |
C09D183/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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