| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for pulling up a silicon single crystal capable of preventing a damage of a quartz crucible in case an unmelted raw material in the quartz crucible collapses when the single crystal is pulled up and being applicable safely and widely. SOLUTION: Before a silicon raw material for crystal 13 is charged in a quartz crucible 5, a reinforcing member 15 is placed on the bottom part inside the quartz crucible 5. By this, in case an unmelted silicon raw material 14 collapses when the silicon raw material for crystal 13 is melted, a damage of the quartz crucible 5 is prevented and serious accidents such as steam explosion can be prevented. Besides, since the existing quartz crucible 5 can be used by placing the reinforcing member 15, an increase of cost can be avoided. In addition, by using a quartz plate as the reinforcing member 15, mixing of impurities into a grown silicon single crystal can be inhibited. COPYRIGHT: (C)2008,JPO&INPIT
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