发明名称 |
ARC RECOVERY WITHOUT OVER-VOLTAGE FOR PLASMA CHAMBER POWER SUPPLIES USING A SHUNT SWITCH |
摘要 |
A system and method for over-voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.
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申请公布号 |
US2008203070(A1) |
申请公布日期 |
2008.08.28 |
申请号 |
US20070677786 |
申请日期 |
2007.02.22 |
申请人 |
ILIC MILAN;SHILO VLADISLAV V;HUFF ROBERT BRIAN |
发明人 |
ILIC MILAN;SHILO VLADISLAV V.;HUFF ROBERT BRIAN |
分类号 |
B23K9/00 |
主分类号 |
B23K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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