发明名称 |
Optical component used in micro-lithographic exposure and projection systems for producing highly integrated circuits consists of synthetic quartz glass containing hydroxyl groups and chemically bound nitrogen |
摘要 |
<p>Optical component consists of synthetic quartz glass containing 1-60 ppm hydroxyl groups and chemically bound nitrogen. An independent claim is also included for a method for the production of synthetic quartz glass.</p> |
申请公布号 |
DE102007017004(A1) |
申请公布日期 |
2008.08.28 |
申请号 |
DE20071017004 |
申请日期 |
2007.04.11 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG |
发明人 |
KUEHN, BODO;OCHS, STEFAN;WEBER, JUERGEN |
分类号 |
G02B1/00;B29D11/00;C03C3/06;G03F7/20 |
主分类号 |
G02B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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