| 摘要 |
PROBLEM TO BE SOLVED: To instantaneously display the desired screen with a simple operation to remove the burden of a setting operation, improving a user-friendliness when operating the setting of a substrate processing device. SOLUTION: An object to be operated with its operation can be set out of a structure of the substrate processing device, a simulator for conducting a simulation of the operation, a touch-panel operation display unit 210 and a simulation operation display unit 220, and a function setting button 232 are provided. The object to be operated and the screen image about the operation setting are correlated and stored in a screen storing unit, then when the function setting button is depressed to specify the operation object by a touch operation during movie display of the operation object on the operation display part, the setting screen associated with it is retrieved from the screen storage part and displayed on the operation display unit. COPYRIGHT: (C)2008,JPO&INPIT
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