发明名称 Methods For Fabricating Semiconductor Components With Conductive Interconnects
摘要 A system for fabricating semiconductor components includes a semiconductor substrate, a thinning system for thinning the semiconductor substrate, an etching system for forming the substrate opening, and a bonding system for bonding the conductive interconnect to the substrate contact. The semiconductor component can be used to form module components, underfilled components, stacked components, and image sensor semiconductor components.
申请公布号 US2008206990(A1) 申请公布日期 2008.08.28
申请号 US20080117919 申请日期 2008.05.09
申请人 发明人 WOOD ALAN G.;HIATT WILLIAM M.;HEMBREE DAVID R.
分类号 H01L21/768 主分类号 H01L21/768
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