发明名称 |
SENSOR ELEMENT, DEVICE AND METHOD FOR INSPECTING A PRINTED CONDUCTOR STRUCTURE, PRODUCTION METHOD FOR SENSOR ELEMENT |
摘要 |
The invention relates to a sensor element for inspecting a printed conductor structure (131) that is mounted on a flat support (130). The sensor element (250) comprises a substrate (251), which is mechanically structured in such a way that it has a raised upper region (260) and lowered lower region (280) said planar upper (260) region and lowered lower region (280) being interconnected by a preferably step-type transition region (270). The sensor element (250) also comprises a plurality of sensor electrodes (261), arranged on the planar upper region (260) and a plurality of connecting conductors (471) for electrically connecting the plurality of sensor electrodes (261). A connecting conductor (471) is connected to each sensor electrode (261), said conductor extending from the respective sensor electrode (261) to the lowered lower region (280). The invention also relates to a device and a method for inspecting a printed conductor structure (131), in addition to a production method for the aforementioned sensor element. |
申请公布号 |
WO2008058949(A3) |
申请公布日期 |
2008.08.28 |
申请号 |
WO2007EP62249 |
申请日期 |
2007.11.13 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT;KLAUSMANN, HAGEN;KRAGLER, KARL |
发明人 |
KLAUSMANN, HAGEN;KRAGLER, KARL |
分类号 |
G01R31/312;G09G3/00 |
主分类号 |
G01R31/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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