WEIGHTING FUNCTION OF ENHANCE MEASURED DIFFRACTION SIGNALS IN OPTICAL METROLOGY
摘要
A weighting function is obtained to enhance measured diffraction signals used in optical metrology. To obtain the weighting function, a measured diffraction signal is obtained. The measured diffraction signal was measured from a site on a wafer using a photometric device. A first weighting function is defined based on noise that exists in the measured diffraction signal. A second weighting function is defined based on accuracy of the measured diffraction signal. A third weighting function is defined based on sensitivity of the measured diffraction signal. A fourth weighting function is defined based on one or more of the first, second, and third weighting functions.
申请公布号
WO2007103302(A3)
申请公布日期
2008.08.28
申请号
WO2007US05573
申请日期
2007.03.05
申请人
TOKYO ELECTRON LIMITED;VUONG, VI;BAO, JUNWEI;LI, SHIFANG;CHEN, YAN