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发明名称
摘要
申请公布号
JP4102277(B2)
申请公布日期
2008.06.18
申请号
JP20030321059
申请日期
2003.09.12
申请人
发明人
分类号
H01L21/822;H01L27/04;H03K19/00;H03K19/003
主分类号
H01L21/822
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