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发明名称
Method for forming amorphous carbon film
摘要
申请公布号
EP1788114(A3)
申请公布日期
2008.06.18
申请号
EP20060023391
申请日期
2006.11.10
申请人
FORSCHUNGSZENTRUM KARLSRUHE GMBH
发明人
STUEBER, MICHAEL, DR.;NIEDERBERGER, LORENZ;LEISTE, HARALD, DR.;ULRICH, SVEN, DR.;WELLE, ALEXANDER, DR.;FISCHER, HARALD, DR.
分类号
C23C14/06;A61B19/00
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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