Method for improving low-K dielectrics by supercritical fluid treatments

摘要

A method for treating an inter-metal dielectric (IMD) layer to improve a mechanical strength and/or repair plasma etching damage including providing a low-K silicon oxide containing dielectric insulating layer; and carrying out a super critical fluid treatment of the low-K dielectric insulating layer including supercritical CO₂ and a solvent including a silicon bond forming substituent having a bonding energy greater than a Si-H to replace at least a portion of the Si-H bonds with the silicon bond forming substituent.