| 摘要 |
An apparatus for measuring a 3D(Three-Dimensional) shape in a phase shifting projection type using a moire generator, and a method thereof are provided to measure the 3D shape of an object using images acquired through first and second projection gratings to remove an auto focus device, thereby shortening a processing time, and measuring the 3D shape in higher accuracy in wider measurement range with low cost. A measured target is installed in a transfer table. A light source(111) and an LED(Light Emitting Diode) light source(121) are installed in the upper part or lower part of the transfer table to emit light. First and second light concentrating lens(112,122) concentrate the light of the light source and the LED light source separately. First and second frequency band filters(113,123) filter the light of the light source and the LED light source concentrated on the first and second light concentrating lens so as for only one-color light to pass. First and second projection gratings(114,124) generate a grating image using the light source and the LED light source separately filtered by the first and second frequency band filters. First and second ultrasonic motors(115,125) moves the first and second projection gratings at a predetermined interval. A first projection unit(116) is composed of a projection optical system in which the grating image generated in the first projection grating is projected and assists a 3D shape measuring apparatus to measure the relative position of an object. A second projection unit(126) is composed of a projection optical system in which the grating image generated in the second projection grating is projected and assists the 3D shape measuring apparatus to measure the absolute position of the object. A light path converting unit(130) converts the light path of the grating image projected in the second projection unit. An image acquisition unit is installed in a side of the first projection unit and has an optical system and a camera(320) for receiving a grating image reflected from the measured target. The first projection unit is positioned in the upper direction of the measured target in a range of 17 to 30 angle of degrees for a vertical upper direction.
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