发明名称 Flip chip metallization method and devices
摘要 Interconnect metallization schemes and devices for flip chip bonding are disclosed and described. Metallization schemes include an adhesion layer, a diffusion barrier layer, a wetable layer, and a wetting stop layer. Various thicknesses and materials for use in the different layers are disclosed and are particularly useful for metallization in implantable electronic devices such as neural electrode arrays.
申请公布号 US7388288(B2) 申请公布日期 2008.06.17
申请号 US20060607273 申请日期 2006.12.01
申请人 UNIVERSITY OF UTAH RESEARCH FOUNDATION;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWAN 发明人 SOLZBACHER FLORIAN;HARRISON REID;NORMANN RICHARD A.;OPPERMANN HANS-HERMANN;DIETRICH LOTHAR;KLEIN MATTHIAS;TOEPPER MICHAEL
分类号 H01L23/52 主分类号 H01L23/52
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