| 摘要 |
A slit nozzle is provided to reduce the time for removing bubbles by allowing bubbles to be discharged easily and to remove the uneven line of coating due to bubbles. A slit nozzle comprises a coating solution supply hole(6) which supplies a coating solution; a slit type discharge hole which has a wide width and discharges the coating solution on a substrate; and a coating solution channel(3) which connects the coating solution supply hole and the slit type discharge hole, wherein the ceil surface of the coating solution channel has a plurality of a chain of mountains having slope and a bubble discharge hole(7) is formed at the coating solution channel to discharge the bubble of the coating solution channel. |
