发明名称 Metal contact structure for solar cell and method of manufacture
摘要 In a solar cell having p doped regions and n doped regions alternately formed in a surface of a semiconductor wafer in offset levels through use of masking and etching techniques, metal contacts are made to the p regions and n regions by first forming a base layer contacting the p doped regions and n doped regions which functions as an antireflection layer, and then forming a barrier layer, such as titanium tungsten or chromium, and a conductive layer such as copper over the barrier layer. Preferably the conductive layer is a plating layer and the thickness thereof can be increased by plating.
申请公布号 US7388147(B2) 申请公布日期 2008.06.17
申请号 US20030412711 申请日期 2003.04.10
申请人 SUNPOWER CORPORATION 发明人 MULLIGAN WILLIAM P.;CUDZINOVIC MICHAEL J.;PASS THOMAS;SMITH DAVID;SWANSON RICHARD M.
分类号 H01L31/00;H01L31/0224;H01L31/068;H01L31/18 主分类号 H01L31/00
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