发明名称 Method and system for supplying high purity fluid
摘要 A fluid purifying apparatus that includes a manifold that includes a first branch and a second branch, a first check valve coupled to the first branch of the manifold, and a purifier unit that includes a first end and a second end, wherein the first end is coupled to the second branch of the manifold. Also, a fluid purifying apparatus that includes a vessel that includes a first interior compartment for containing a purifier material and a second interior compartment for containment of a fluid containing impurities, wherein the first interior compartment is separated from the second interior compartment by a fluid permeable support, and a rupturable seal.
申请公布号 US7387663(B2) 申请公布日期 2008.06.17
申请号 US20050082482 申请日期 2005.03.17
申请人 MATHESON TRI-GAS, INC. 发明人 WATANABE TADAHARU;TORRES, JR. ROBERT;VININSKI JOSEPH
分类号 B01D53/04;B01D53/02;B01J4/04;C23C16/44;F17C5/00;F17C6/00;F17C7/00;F17C9/00;F17C13/02 主分类号 B01D53/04
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