| 摘要 |
An array substrate for an LCD(Liquid Crystal Display) and a manufacturing method thereof are provided to minimize a tail of an active layer exposed to the circumference of source, drain electrodes and a data line, thereby minimizing the wavy noise. A substrate is prepared. Plural gate lines with plural gate electrodes are formed on the substrate and extended toward a direction. A gate insulating layer, a pure amorphous silicon layer, an impurity amorphous silicon layer and a conductive layer are stacked on the entire surface of the substrate. The first photo-sensitive pattern having a step and the second photo-sensitive pattern are formed after forming and patterning the photo-sensitive layer. A source and drain metal layer(120) is formed at the lower portion of the first photo-sensitive pattern and a data line is formed at the lower portion of the second photo-sensitive pattern. After removing a portion of the first and second photo-sensitive patterns, the impurity amorphous silicon layer and pure amorphous silicon layer exposed to the circumference of the first and second photo-sensitive pattern(118a,118b) are etched. The lower portion of the first photo-sensitive pattern is completely removed so that the source and drain metal layer is exposed. The exposed source and drain metal layer is removed so that a data line is formed. Thereafter, a pure amorphous silicon layer(110) is exposed by removing the impurity amorphous silicon layer. Thereafter, the first and second photo-sensitive layers are removed and then a passivation layer is formed. A pixel electrode is contacted with the exposed drain electrode. |
