PLASMA PROCESSING APPARATUS WITH RESONANCE COUNTERMEASURE FUNCTION,申请号KR20060017863-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS WITH RESONANCE COUNTERMEASURE FUNCTION
摘要
申请公布号	KR100838749(B1)	申请公布日期	2008.06.17
申请号	KR20060017863	申请日期	2006.02.23
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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