METHOD FOR ANALYSING NANO-STRUCTURE USING ELECTRON MICROSCOPE

摘要

A method for analyzing a nano-structure using an electron microscope is provided to implement various and accurate analysis by preventing damage to the nano-structure as an analysis object and reduce cost by simplifying the entire analysis process. A method for analyzing a nano-structure using an electron microscope includes the steps of directly growing the nano-structure on a specimen supporting member and/or an upper layer formed on the specimen supporting member, and analyzing the nano-structure. The specimen supporting member is a metal specimen grid(1) which has a melting point higher than a growth temperature of the nano-structure.