摘要 |
A substrate cleaning container and a substrate cleaning apparatus including the same are provided to prevent a rinse container from being damaged due to a cleaning solution. A container has an opened upper portion to fill a cleaning solution therein. A protection member(330) covers portions of a sidewall and upper region of the container to protect a portion of the container. The container has an inner container(322) and an outer container(324) enclosing the inner container. The protection member is formed at a portion of the sidewall and upper region of the outer container. The protection member is formed along an inner surface, an upper surface and an outer surface of the outer container.
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