| 摘要 |
An angular speed sensor includes a vibrator that vibrates, first and second differential circuits that output respective first and second differential signals, and a synchronous detection circuit that synchronously detects the first and second differential signals. First and second detection units output respective first and second detection signals according to the deformation caused by inertial force. The phases of the first and second detection signals are inverted to each other. The first differential signal corresponds to the difference obtained by subtracting the first detection signal from the second detection signal. The second differential signal corresponds to the difference obtained by subtracting the second detection signal from the first detection signal. The angular speed sensor can precisely detect the angular speed of the vibrator. |
