ETALON SPEKTROMETER MIT DOPPELTEM STRAHLDURCHGANG,申请号AT20000101694T-传众专利搜索

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发明名称	ETALON SPEKTROMETER MIT DOPPELTEM STRAHLDURCHGANG
摘要
申请公布号	AT397201(T)	申请公布日期	2008.06.15
申请号	AT20000101694T	申请日期	2000.02.03
申请人	CYMER, INC.	发明人	ERSHOV, ALEXANDER I.
分类号	G01J3/12;G01J3/26;G01B9/02;G01J1/00;G01J3/00;G01J3/02;G01J3/28	主分类号	G01J3/12
代理机构		代理人
主权项
地址

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