| 摘要 |
The invention concerns a vacuum line for pumping gases in a process chamber, comprising at least: a pumping unit including a pump housing and a motor, a system for discharging the gases, first means for measuring a functional parameter concerning the motor, second means for measuring a functional parameter concerning the discharge system, and means for predicting the duration of use of the vacuum line. The prediction means calculates the duration of use of the vacuum line prior to failure of the pumping unit, based on the measurement of the functional parameter concerning the motor supplied by the first means and on the measurement of a functional parameter concerning the discharge system supplied by the second means. In another embodiment, the vacuum line further comprises third means for measuring a functional parameter concerning the pump housing, and the prediction means calculates the duration of use taking into account the measurement of said parameter. |
