发明名称 COMPOUND FOR FORMING A PHOTORESIST, PHOTORESIST COMPOSITION INCLUDING THE COMPOUND AND METHOD OF FORMING A PATTERN
摘要 A photoresist composition includes a cyclic compound, a photoacid generator, and an organic solvent. The cyclic compound includes any one selected from the group consisting of moieties having chemical structures represented by the formulae (1), (2), (3) and (4) set forth herein, and at least one moiety having the chemical structure represented by the formula (9) set forth herein.
申请公布号 KR100770223(B1) 申请公布日期 2007.10.26
申请号 KR20060105989 申请日期 2006.10.31
申请人 发明人
分类号 G03F7/004;G03F7/039 主分类号 G03F7/004
代理机构 代理人
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