| 摘要 |
A target for a sputtering source can be subdivided into a plurality of exchangeable target segments (9). Each target segment (9) contains coating material, wherein each target segment (9) borders on at least two adjacent target segments (9', 9"), wherein each target segment is connectable to a base body (2, 13, 15) by means of at most one securing means (7, 8, 10)</SDO AB>
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